ZYGO MARK GPI-XPS 6500-0203-01 Interferometer Interface Controller

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ZYGO MARK GPI-XPS 6500-0203-01 Interferometer Interface Controller.

Key Features & Capabilities

1. Core Functionality

• Interfaces between ZYGO interferometers (e.g., Mark III, Mark IIxp) and host computers

• Provides nanometer-resolution position feedback for motion control systems

• Supports dynamic measurements (velocity/acceleration) up to 2 m/s

2. Technical Parameters

• Measurement Resolution: <1 nm (with environmental compensation)

• Update Rate: Up to 20 kHz for high-speed applications

• Channel Capacity: Typically 1-2 axes (expandable via daisy-chaining)

3. Signal Processing

• Subdivision Electronics: 4096x interpolation for enhanced resolution

• Environmental Compensation: Automatic air refractive index correction

4. I/O & Connectivity

• Analog Outputs: ±10V for servo control loops

• Digital Interfaces: RS-232/422, optional Ethernet

• Trigger Inputs: Synchronization with external systems

5. Compatibility

• Designed for ZYGO HeNe laser interferometers (632.8 nm wavelength)

• Works with linear, angular, and straightness optics

Applications

• Semiconductor Equipment: Lithography stage metrology

• Precision Manufacturing: CNC machine tool calibration

• Research Facilities: Nanotechnology positioning systems

• Aerospace: Large-scale component alignment