Basic Specifications:
Manufacturer: Applied Materials (AMAT)
Model: 0010-23716
Type: PMAX Pyrometer/Emissometer Probe Assembly
Application: Semiconductor wafer processing, CVD, epitaxy, and annealing
Key Features & Performance:
✔ High-Accuracy Temperature Sensing – Non-contact infrared (IR) pyrometry for precise real-time measurements.
✔ Emissivity Compensation – Integrated emissometer ensures reliable readings across varying wafer surfaces.
✔ Wide Temperature Range – Optimized for semiconductor high-temperature processes (exact range depends on configuration).
✔ Fast Response Time – Enables dynamic process control in rapid thermal processing (RTP).
✔ Robust Construction – Designed to withstand harsh chamber environments (corrosive gases, plasma, etc.).
Compatibility & Integration:
Seamless AMAT Tool Integration – Works with Applied Materials’ Pmax and other advanced semiconductor systems.
Industry-Standard Interfaces – Supports factory automation protocols for data logging and process control.
Calibration Stability – Long-term reliability with minimal drift for consistent performance.
Quality & Certifications:
High Repeatability – Critical for uniform wafer processing in nanoscale fabrication.
SEMI-Compliant – Meets semiconductor equipment industry standards.
AMAT Validated – Manufactured and tested under Applied Materials’ stringent quality controls.