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LAM 810-072907-005 ASSY PCB VTM BREAKOUT BOARD is a specialized printed circuit board (PCB) assembly designed for LAM Research semiconductor processing equipment as part of a vacuum transfer module (VTM) or related subsystems.
Functional Role in Lam Research VTM Systems
Primary Purpose:
Wafer-handling sensor signals (e.g., position sensors, vacuum pressure monitors).
Motor/actuator control (e.g., robotic arm movements).
Safety interlock circuits (e.g., door switches, vacuum integrity checks).
Acts as an interface/breakout board for signal routing, power distribution, and communication between the VTM and other tool modules.
May handle:
Integration:
OTHERS ALSO LEARNED ABOUT THE FOLLOWING PRODUCTS：